High-performance and linear thin-film lithium niobate Mach-Zehnder modulators on silicon up to 50 GHz. The orange curve in Fig. Further increase of the modulation frequency shifts apart the two side lobes accordingly, with amplitude decreased, while the position of the center lobe remains unchanged, as expected from the non-adiabatic driving. Here, we make an important step towards miniaturizing functional components on this. Chen, X. et al. 5a, the cavity resonance tunes smoothly with the applied voltage, without any degradation to the lineshape or coupling depth, clearly showing the pure dispersive electro-optic tuning as expected from the Pockels effect. As an example application, we demonstrate electro-optic switching of non-return-to-zero (NRZ) signal at a rate of 11Gbs1, with a switching energy as low as 22fJ per bit that is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. To show this phenomenon, we applied a sinusoidal RF signal at a certain frequency to the EOM and monitored the transmission spectrum of the device by scanning laser back and forth across the cavity resonance. Modern advanced photonic integrated circuits require dense integration of high-speed electro-optic functional elements on a compact chip that consumes only moderate power. the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in It, however, degrades considerably the optical Q of the cavity (Fig. It has a bias control section that integrates with a tap monitor for stable operation. 35, 411417 (2017). It was supported by the Defense Advanced Research Projects Agency under grant HR0011-20-C-0137 and the Air Force Office of Scientific Research under grant FA9550-19-1-0376. b Same as a but with a modulation frequency of 2.0GHz. Lett. Liu et al. 42.70.a. https://doi.org/10.1038/s41467-020-17950-7, DOI: https://doi.org/10.1038/s41467-020-17950-7. Such flexibility allows us to observe direct transition between the adiabatic driving regime and the non-adiabatic regime simply by continuously sweeping the modulation frequency to across the cavity linewidth. 35, 14501455 (2017). 8c). Electron. Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth. Photon. Thank you for visiting nature.com. In this contribution, we simulate, design, and experimentally demonstrate an integrated optical isolator based on spatiotemporal modulation in the thin-film lithium niobate on an insulator waveguide platform. Figure5b shows a clear linear dependence of the induced resonance wavelength shift on the applied voltage, from which we obtained a tuning slope of 16.0pmV1 (corresponding to a frequency tuning slope of 1.98GHzV1), close to our design. 6c, where a driving power of 16mW (corresponding peak-to-peak driving voltage, Vpp, of Vpp=2.5V) splits the cavity resonance into five with notable magnitudes (black curve), resulting in a cavity transmission with five side lobes (blue curve). The broad modulation bandwidth of these devices would thus enable high-speed electro-optic switching. Express 26, 2372823739 (2018). & Thomson, D. J. Streshinsky, M. et al. IEEE J. Quantum Electron. That highlighted in blue indicates the large metal pad used for contacting the RF probe. To characterize the optical and electro-optic properties of the devices, a continuous-wave tunable laser (Santec TSL-510) was launched onto the chip via a lensed fiber. @article{Ghosh2023WaferscaleHI, title={Wafer-scale heterogeneous integration of thin film lithium niobate on silicon-nitride photonic integrated circuits with low loss bonding interfaces}, author={Siddhartha Ghosh and Siva Yegnanarayanan and Dave Kharas and Matthew Ricci and Jason Plant and Paul W. Juodawlkis}, journal={Optics Express}, year . This is a typical signature of resonance modulation in the sideband-unresolved regime, where the cavity resonance follows adiabatically the electric driving signal in a sinusoidal fashion, resulting in a broadened average transmission spectrum (Fig. a is the lattice constant. Opt. Ultrafast electro-optic light with subcycle control. Ozaki, J., Ogiso, Y. Google Scholar. They are also expected to be building blocks for emerging applications such as quantum photonics5,6 and non-reciprocal optics7,8. The electrodes are designed to have a length of 30m to ensure a full coverage of the applied electric field over the entire photonic-crystal structure. Opt. Wang, C. et al. On the other hand, lithium niobate electro-optic modulators, the workhorse of the optoelectronic industry for decades9, have been challenging to integrate on-chip because of difficulties in microstructuring lithium niobate. 41, 57005703 (2016). 2, red box) is used primarily for impedance matching to the large metal pad for probe contact, which can be decreased to 3m for a fully on-chip operation36. conceived the experiment. Express 22, 2862328634 (2014). Science 358, 630632 (2017). Next, the team aims to increase the lasers power and scalability for even more applications. Coherent modulation up to 100 GBd 16QAM using silicon-organic hybrid (SOH) devices. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. Wolf, S. et al. Shao, L. et al. Recently, thin-film monolithic LN11,12 emerges as a promising platform, where low-loss and high-quality photonic integration together with the strong Pockels effect enables superior modulation performance13,14,15,16,17,18,19,20,21,22,23,24,25,26, showing great potential as an excellent medium for photonic integrated circuits and future photonic interconnect. Opt. Mercante, A. J. et al. This series of Lithium Niobate fiberoptic Modulators is designed for laboratory test use. Opt. Nature 562, 101104 (2018). Rao, A. Zhou, B., Li, E., Bo, Y. The electro-optic modulation demonstrated in the previous section indicates the potential high-speed operation of the EOMs. IEEE J. Sel. 42.25.p. The electrodes are designed to be placed close to the photonic-crystal resonator (Fig. To obtain Wang, C., Zhang, M., Stern, B., Lipson, M. & Loncr, M. Nanophotonic lithium niobate electro-optic modulators. The left inset shows the orientation of the LN crystal where the optical axis is along the z direction. Fortier, T. M. et al. 38, 33383345 (2020). Low-loss plasmon-assisted electro-optic modulator. 9, 525528 (2015). Thorlabs free-space electro-optic (EO) amplitude and phase lithium niobate modulators combine our experience with crystal growth and electro-optic materials. Internet Explorer). Topics: The equipment in the highlighted dashed box is used for characterizing the performance of electro-optic modulation. Thinfilm lithium niobate (TFLN) has been widely used in electrooptic modulators, acousticoptic modulators, electrooptic frequency combs and nonlinear wavelength converters owing to the. Get the most important science stories of the day, free in your inbox. J. Lightwave Technol. High-performance and linear thin-film lithium niobate MachZehnder modulators on silicon up to 50GHz. 34, 29412951 (2016). For example, the capacitance of our device can be significantly decreased since the majority of the metallic parts in the current devices are used for coupling the RF driving signal, which can be removed in a future on-chip integration design. Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. Nature 435, 325327 (2005). Integrated lithium niobate photonics is a promising platform for the development of high-performance chip-scale optical systems, but getting a laser onto a lithium niobate chip has proved to be one of the biggest design challenges, saidMarko Loncar, the Tiantsai Lin Professor of Electrical Engineering and Applied Physics at SEAS and senior author of the study. A review of lithium niobate modulators for fiber-optic communications systems. The high quality of device fabrication as indicated by the device images implies high performance of the EOM, as we will show below. 35, 346396 (2017). We expect that these optimization would significantly improve the energy efficiency of the LN photonic-crystal EOM, further decreasing the switching energy down to sub-femtoJoule level. Opt. External modulator is typically either a LiNbO3 modulator or an electroabsorptive modulator. 1d). The light reflected from the EOM was collected by the same lensed fiber, routed by a circulator, and then delivered to a photodiode for detection. After the residue removal, we used diluted hydrofluoric acid to undercut the buried oxide layer to form a suspended photonic-crystal membrane structure (Fig. 8b, c. However, Fig. Single-chip microprocessor that communicates directly using light. IEEE Photonics Technol. This work demonstrates the first (to the best of our knowledge) thin film lithium niobate electro-optic modulator operating at a wavelength of 1064 nm. This value primarily reaches the photon-lifetime limit of the EOM cavity (~11ps), as the electrode circuit has much broader spectral response as indicated by the flat S11 reflection spectrum shown in the inset of Fig. For microwave simulations, the electric-field values are obtained when a voltage of 1V is applied across the two electrodes. The modulators enable efficient electro-optic driving of high-Q photonic cavity modes in both adiabatic and non-adiabatic regimes, and allow us to achieve electro-optic switching at 11 Gb s1 with a bit-switching energy as low as 22 fJ. Quant. To maximize the electro-optic interaction, we utilize a partially etched structure with a rib-waveguide-like cross-section, leaving a 150-nm-thick wing layer for the electrodes to sit on (Fig. If you find something abusive or that does not comply with our terms or guidelines please flag it as inappropriate. Our traveling-wave design and advanced index-matching technologies enable optical response over the entire millimeter-wave spectrum (up to 300 GHz). Nevertheless, there still exists a balance between the driving voltage and modulation bandwidth. High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate. 6, 6982 (2000). Characterization of electro-optic bandwidth of ultra-high speed modulators. Proc. Such a supercell of metasurface is constructed by two kinds of finite-sized arrays possessing different topological properties via the generalized two-dimensional (2D . Opt. Di Zhu, and Mengjie Yu, from SEAS, Hannah R. Grant, Leif Johansson from Freedom Photonics and Lingyan He and Mian Zhang from HyperLight Corporation. They also thank Wuxiucheng Wang, Lejie Lu, and Ming Gong for valuable discussions and help on testing. All-electronic 100-GHz bandwidth digital-to-analog converter generating PAM signals up to 190Gbaud. https://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=3948. Lithium Niobate Electro-Optic Modulators. Chen, L., Xu, Q., Wood, M. G. & Reano, R. M. Hybrid silicon and lithium niobate electro-optical ring modulator. The device exhibits a resonance at 1554.47nm, which corresponds to the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\) (Fig. Applied Physics, Optics / Photonics, Tiantsai Lin Professor of Electrical Engineering, Leah Burrows Figure4a shows the transmission spectrum of an EOM when the laser is scanned in the telecom band. Ayata, M. et al. Optica 4, 15361537 (2017). Rao, A. et al. For direct CMOS driving, the RF amplifier is bypassed. Here, we report an EO lithium niobate metasurface mediated by topological corner states. Ghelfi, P. et al. However, when the modulation frequency is tuned above 1.0GHz towards the cavity linewidth, the two side lobes moves towards each other and the spectral shape is considerably distorted, until around 1.8GHz where the transmission spectrum splits into three lobes, with the two side lobes located about 1.8GHz from the center. Although the breaking of the mirror symmetry along the normal direction of the device plane considerably alters the band gap of the photonic crystal (Fig. The gray regions represents the 3-dB bandwidth limit for two devices, respectively, and the dashed line indicates the 3-dB limit of S21. CAS a Recorded transmission spectrum of the EOM cavity as a function of applied DC voltage from 0 to 4.5V, with a voltage step of 0.5V. b Recorded resonance shift as a function of applied DC voltage, where the experimental data are shown in black dots and the blue line is a linear fitting to the data. The blue open circles show the dielectric and air bands. Input requirements, test setups, and mounting instructions will be covered. Jin, S., Xu, L., Zhang, H. & Li, Y. LiNbO3 thin-film modulators using silicon nitride surface ridge waveguides. Weigel, P. O. et al. Google Scholar. Article This work was performed in part at the Cornell NanoScale Facility, a member of the National Nanotechnology Coordinated Infrastructure (National Science Foundation, ECCS-1542081). performed numerical simulations. 8, 701705 (2014). Zhang, M. et al. 1a) since it supports compact optical and electrical integration to enhance the electro-optic response. The large metal pads (highlighted in blue box) are used simply as the contacts for the air-coplanar probe (Formfactor Acp65-A-GSG-100) for applying the RF driving signal (see also the inset of Fig. Department of Electrical and Computer Engineering, University of Rochester, Rochester, NY, 14627, USA, Mingxiao Li,Jingwei Ling,Yang He&Qiang Lin, Institute of Optics, University of Rochester, Rochester, NY, 14627, USA, You can also search for this author in Nature thanks M. Hochberg and the other anonymous reviewer(s) for their contribution to the peer review of this work. Top. a, b, Schematics of the cross-sections of thin-film (a) and conventional (b) LN modulators. In most cases, lasers are stand-alone devices, external to the modulators, making the whole system more expensive and less stable and scalable. Photonics 11, 5357 (2017). d Cross-sectional schematic of the EOM structure, where the arrow profile shows the radio frequency (RF) electric field distribution and the color profile shows the optical cavity mode field distribution, both simulated by the FEM method. Lett. Opt. The authors thank Professor Hui Wu and Professor Wayne Knox for the use of their equipment. Optica 1, 112118 (2014). Loncar and his team used small but powerful distributed feedback lasers for their integrated chip. In 2017 Optical Fiber Communications Conference and Exhibition 13 (2017); https://doi.org/10.1364/OFC.2017.Tu2H.7. e, Group refractive indices for both optical and microwave signals as a function of the buried oxide thickness. Haffner, C. et al. Here we report high-speed and energy-efficient LN photonic-crystal EOMs, which exhibits a tiny electro-optic modal volume of only ~0.58m3, the smallest among all high-speed LN EOMs ever reported1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, to the best of our knowledge. We first assess the performance of our high symbol rate transmitter . Extended Data Fig. The devices were fabricated on a 300-nm-thick x-cut single-crystalline LN thin film bonded on a 3-m silicon dioxide layer sitting on a silicon substrate (from NanoLN). The high efficiency of electro-optic tuning together with the high optical quality of the EOM resonator enables efficient electrical driving of the optical mode into different dynamic regimes. The gray curves show the created individual sidebands with Lorentzian-shape resonances and the dashed vertical lines indicates their relative frequency positions. Rev. Use the Previous and Next buttons to navigate the slides or the slide controller buttons at the end to navigate through each slide. Optica 5, 233236 (2018). Witmer, J. D. et al. Acousto-optical modulation of thin film lithium niobate waveguide devices. Chen, L., Wood, M. G. & Reano, R. M. 12.5 pm/V hybrid silicon and lithium niobate optical microring resonator with integrated electrodes. Loncar is a cofounder of HyperLight Corporation, a startup which was launched to commercialize integrated photonic chips based on certain innovations developed in his lab. Sign up for the Nature Briefing newsletter what matters in science, free to your inbox daily. Nature 528, 534538 (2015). PubMed Sci. Nature 546, 622626 (2017). CAS Hybrid Silicon and Lithium Niobate Modulator Abstract: Hybrid Lithium Niobate (LN) and Silicon photonic (SiPh) integration platform has emerged as a promising candidate to combine the scalability of silicon photonics with the excellent modulation performance of LN. Science 358, 630632 (2017). 25, 458460 (1974). ADS Schmidt, R. V. & Kaminow, I. P. Metal-diffused optical waveguides in LiNbO3. Qiang Lin. Lithium niobate (LiNbO3) modulator can be regarded as a technology platform that can add values to optical networks and is suitable for addressing many issues. Peer review information Nature Communications thanks Huihui Lu, and the other, anonymous, reviewer(s) for their contribution to the peer review of this work. High-speed plasmonic modulator in a single metal layer. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. Femtojoule electro-optic modulation using a silicon-organic hybrid device. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages, Sub-1 Volt and high-bandwidth visible to near-infrared electro-optic modulators, Spectral control of nonclassical light pulses using an integrated thin-film lithium niobate modulator, Single-photon detection and cryogenic reconfigurability in lithium niobate nanophotonic circuits, Femtojoule femtosecond all-optical switching in lithium niobate nanophotonics, Extending the spectrum of fully integrated photonics to submicrometre wavelengths, Ultra-low-power second-order nonlinear optics on a chip, Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications, Femtofarad optoelectronic integration demonstrating energy-saving signal conversion and nonlinear functions, http://creativecommons.org/licenses/by/4.0/, Controlling single rare earth ion emission in an electro-optical nanocavity, Photonic van der Waals integration from 2D materials to 3D nanomembranes, Hydrothermal growth of KTiOPO4 crystal for electro-optical application, High-performance polarization management devices based on thin-film lithium niobate. , how to change owner on indeed account,
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